Installing Calico on my EKS (k8s version 1.21)

Hi, I tried to install calico following this url on my EKS (k8s version 1.21) https://docs.aws.amazon.com/eks/latest/userguide/calico.html

resources in namespace tigera-operator deployed successfuly. but in calico-system, deployment.apps/calico-kube-controllers is failed on deployment and log shows,

NAME READY STATUS RESTARTS AGE calico-kube-controllers-6b5d45f4dc-n9tjn 0/1 CreateContainerConfigError 0 3m42s

kubectl logs calico-kube-controllers-6b5d45f4dc-n9tjn -n calico-system >>> Error from server (BadRequest): container "calico-kube-controllers" in pod "calico-kube-controllers-6b5d45f4dc-n9tjn" is waiting to start: CreateContainerConfigError

kubectl describe deployment.app/calico-kube-controllers -n calico-system >>> Name: calico-kube-controllers Namespace: calico-system CreationTimestamp: Fri, 04 Mar 2022 11:45:52 +0900 Labels: k8s-app=calico-kube-controllers Annotations: deployment.kubernetes.io/revision: 1 Selector: k8s-app=calico-kube-controllers Replicas: 1 desired | 1 updated | 1 total | 0 available | 1 unavailable StrategyType: Recreate MinReadySeconds: 0 Pod Template: Labels: k8s-app=calico-kube-controllers Service Account: calico-kube-controllers Containers: calico-kube-controllers: Image: docker.io/calico/kube-controllers:v3.21.4 Port: <none> Host Port: <none> Liveness: exec [/usr/bin/check-status -l] delay=10s timeout=10s period=10s #success=1 #failure=6 Readiness: exec [/usr/bin/check-status -r] delay=0s timeout=10s period=10s #success=1 #failure=3 Environment: KUBE_CONTROLLERS_CONFIG_NAME: default DATASTORE_TYPE: kubernetes ENABLED_CONTROLLERS: node KUBERNETES_SERVICE_HOST: ######## KUBERNETES_SERVICE_PORT: 443 Mounts: <none> Volumes: <none> Priority Class Name: system-cluster-critical Conditions: Type Status Reason

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Available False MinimumReplicasUnavailable Progressing True ReplicaSetUpdated OldReplicaSets: <none> NewReplicaSet: calico-kube-controllers-6b5d45f4dc (1/1 replicas created) Events: Type Reason Age From Message

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Normal ScalingReplicaSet 5m41s deployment-controller Scaled up replica set calico-kube-controllers-6b5d45f4dc to 1

please help me to finish the installation>?