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I'm having the same issue:
Embedded stack arn:aws:cloudformation:us-east-1:XXXXXXXXXXX:stack/microsost-pki-83a8c03-TwoTierCAStack-1XX3IQBVRYVZS/e6cebc40-ca65-11ee-a8e7-0a627cbc35fb was not successfully created: The following resource(s) failed to create: [SubCA].
. Any luck with it?